Autonomous power-scavenging MEMS robots

The initial development of novel 80- and 500-/spl mu/m MEMS flying robots with potential autonomous movement and power-scavenging abilities are described in this paper. Microrobot applications as well as the developments of walking and flying miniature robots are discussed. Laser-heating theory as a powering scheme and residual-stress deflection are investigated. Several pinwheel-based robots composed of polysilicon and gold have been designed and fabricated in polyMUMPs. Residual-stress actuators are imbedded into each robot wing and powered optothermally with a 660-nm laser. The robots are designed to heat and cool asymmetrically so as to rotate and generate lift. Preliminary results from 500-/spl mu/m fabricated designs show a vertical wingtip deflection of 7.2-/spl mu/m. Laser-powered actuation is yet to be tested. Once these robots demonstrate autonomous flight, further research in integrating CMOS processing circuitry and MEMS-based sensors and actuators are investigated.