Precise analogue characterization of MIM capacitors using an improved charge-based capacitance measurement (CBCM) technique

The MIM capacitor is a key building block for mixed signal design. To perform an accurate analogue characterization of the MIM capacitor, a precise technique based on an improved CBCM is proposed. A test structure containing the pass-gate implementation of the CBCM structures and the leakage current suppression circuits has been designed, fabricated and tested in AMIS 0.35 mm process. The technique has been proven to be accurate, robust and easy to use for the analogue characterization of the MIM capacitors.