Recent study of ion charge state distribution in vacuum arc ion sources

The results of research of factors which can influence the charge state distribution (CSD) of ions in vacuum arc plasmas are described. The CSD has been investigated using the time of flight (TOF) method. A strong influence of a magnetic field and the background pressure were observed. Here we summarize the results and discuss the influence of these parameters on the CSD of ion beams for the Mevva and Titan ion sources, and discuss possible approaches for increasing the ion charge states and the generation of hybrid gas-metal ion beams by sources.