A Low Smear Structure For 2M-pixel CCD Image Sensors

We have developed a new smear suppression cell structure built with the second Al shunt process, for 1-inch optical format 2M-pixel FIT-CCD image sensors. The characteristics of this structure are that the first Al layer works as the photoshield and the second one is used for the V-register drive pulse wiring. With this structure, we could reduce smear levels to less than -110dB. Moreover, we could achieve levels below -120dB with a micro on-chip-lens.