Dense X-pinch plasmas for X-ray microlithography

Summary form only given. All experimental study of the radiation emission from aluminum and magnesium X-pinch experiments was conducted. The single cross X-pinch, driven by the 0.5 TW, 40-ns-pulse-width Lion accelerator, consists of 2-8 fine wires stretched between the output electrodes of Lion so as to touch at a single point. The number and size of Al and Mg wires were varied in order to optimize the K-shell line radiation. K-shell line radiation as well as harder radiation at 4-4.5 keV were observed to be emitted from a submillimeter region at the crossing point of the wires for both the aluminum and the magnesium X-pinch. The presence of the 4-4.5-keV component of the radiation from all as yet unidentified mechanism reduced the estimate of the optimized energy yield in the Al K-shell (1.6-1.7 keV) in an earlier experimental run. In the present run, a total yield of 20±10 J in K-shell radiation is estimated for loads consisting of two 50-μm Al wires with peak currents up to of 450 kA. This current is reduced by 20% from that of the previous run. Optimization of the K-shell emission from a magnesium x-pinch results ill a K-shell (~1.4 keV) radiation yield of 40±20 J and 1-5 J of harder radiation with a 450-kA peak current