On-line learning delivery decision support system for highly product mixed semiconductor foundry

A production learning system (PLS) based on the tool model was constructed as a decision support and real-time information update system to forecast the cycle time. A tool model includes a waiting model and a processing model. Each of the waiting and processing models uses a backpropagation neural network to establish the relationship between the input and output (time) of the model. Hence, cycle time estimation, tool group move and confirm line item performance (CLIP) value can be obtained based on the memory stored in the neural network. The result shows that the forecasting ability of the PLS has an error rate below 8% on average.