Application of IEC61131-3 for semiconductor processing equipment

The control system for the semiconductor processing equipment (SPE) includes multiple functions. It should be linked to the factory production management computer with SECS interface etc, it should have human interface (HMI) for the operator to the machine information and at the same time it should be equipped with real-time machine control. In this paper the control system for the SPE is introduced, in which the IEC61131-3 standard is applied for the real-time control hierarchy. We have developed total control system by using application software effectively on the de facto standard operating system.