Modeling of MOEMS components using HDL-A

A method for modeling the optomechanical coupling in MOEMS components is presented. For this purpose, the beam propagation method has been implemented using a hardware discription language. This enables the simulation of optical wave propagation on the system level, along with existing mechanical models in the same environment. Both free space and guided wave microopto-electromechanical systems components are simulated using this technique and satisfactory results are obtained.