Measurement and wavelet denoising parameter extraction for MMIC on chip square spiral inductors

Accurate measurement and parameter extraction for square spiral inductors are important to MMIC design. Square spiral inductors with a G-S-G open circuit structure have been designed, fabricated, and measured. In order to extract reasonable and smooth parameters from measured data, wavelets combined with a data fitting technique are applied to denoise the measured data. More reasonable S-parameters and circuit parameters can be extracted from the denoised data that are useful for MMIC design.