Micromachining of glass inertial sensors

We demonstrate the feasibility of a powder blasting micro-erosion process for the micromachining of accelerometer devices in glass. Using high-speed abrasive microparticles and a metal contact mask, we structure millimeter-size cantilever beams from simple glass slides. By metalizing one side of the glass substrate, we demonstrate both capacitive and piezoresistive/strain gauge detection of the vibrating cantilever mass and measure the frequency response of mechanically excited cantilever beams. We think that our approach opens new perspectives for manufacture of inertial sensing devices in a technology alternative to Si.