Impact of die-to-die and within-die parameter fluctuations on the maximum clock frequency distribution for gigascale integration

A model describing the maximum clock frequency (FMAX) distribution of a microprocessor is derived and compared with wafer sort data for a recent 0.25-/spl mu/m microprocessor. The model agrees closely with measured data in mean, variance, and shape. Results demonstrate that within-die fluctuations primarily impact the FMAX mean and die-to-die fluctuations determine the majority of the FMAX variance. Employing rigorously derived device and circuit models, the impact of die-to-die and within-die parameter fluctuations on future FMAX distributions is forecast for the 180, 130, 100, 70, and 50-nm technology generations. Model predictions reveal that systematic within-die fluctuations impose the largest performance degradation resulting from parameter fluctuations. Assuming a 3/spl sigma/ channel length deviation of 20%, projections for the 50-nm technology generation indicate that essentially a generation of performance gain can be lost due to systematic within-die fluctuations. Key insights from this work elucidate the recommendations that manufacturing process controls be targeted specifically toward sources of systematic within-die fluctuations, and the development of new circuit design methodologies be aimed at suppressing the effect of within-die parameter fluctuations.