Optimization of Anchor Placement in TPoS MEMS Resonators: Modeling and Experimental Validation

In this paper, a semi-analytical model is derived to calculate the anchor loss of TPoS resonators operating in higher-order length extensional modes. This model provides valuable insights on the effect of order, device dimensions, position and number of anchors on the quality factor (Q) of these resonators. Results from this model are in close agreement with the FEM simulations. The optimum position, dimension, and the number of anchors to deliver the highest Q are also discussed. Predictions of the model are validated through characterization of TPoS resonators fabricated to operate at a resonant frequency of around 1 GHz with different number of anchor pairs and position. A
$23^{rd}$
order resonator with a W/L ratio of 1.5 with three pairs of anchors placed at positions suggested by the model gave a loaded Q of 4431, which is 65% more than the conventional case where anchors are uniformly placed towards the edge, and also an improvement in the insertion loss by 5.5 dB compared to the latter. For resonators where the anchor loss is predominant, our results show that the performance can be improved by placing the anchors at the optimum position, closer to the middle of the resonator than the conventional scheme where anchors are uniformly placed towards the edge.