Modelling and compensation of quadrature error for silicon MEMS microgyroscope

This paper presents the mathematical modelling on the quadrature error of a microgyroscope due to the imbalance of the asymmetric spring flexures and compensation circuit to draw the fin back to the balanced position (equal gap between the upper and lower capacitor banks). Quadrature error is a major concern in a microgyroscope for low-rate sensing, e.g. a few degrees per hour.