A study of TiO/sub 2/, BaO and SrO thin films deposited by electrostatic spray assisted MOCVD

In this study, the electrostatic spray assisted ESA-MOCVD is found to have the advantages of simple apparatus without gas lines, easy control of nano-sized droplets by applied voltage and solution rates, and easy control of thin film compositions by controlling the starting solution composition. The effect of deposition parameters on the growth behavior of TiO/sub 2/ thin films such as substrate temperature, deposition time, applied voltage, oxygen rates, and annealing effect were investigated. The microstructure, composition and roughness were characterized by SEM, XPS and AFM, respectively. XRD was used to determine crystallization. Finally, we found how to adjust to deposit BaO and SrO thin films by ESA-MOCVD.