Recessed gate-data line-crossover structures employing an air-gap to reduce signal delay for TFT-LCD panel

Two new line-crossover structures entitled "recessed air-bridge structure" and "recessed gate-line structure," which have improved mechanical durability and reduced data-tine signal delay in active matrix liquid crystal display (AMLCD) panel, have been proposed and fabricated. In the recessed air-bridge structure, the air-gap line-crossover is located at the bottom of the oxide trench so that the floated upper lines lie flush with the panel's surface. The recessed gate-line structure was fabricated by recessing the whole gate-line into the bottom of an oxide trench. Both of the fabricated structures, without any passivation layer, were proved sufficiently robust to withstand a rubbing process, which applied realistic mechanical stresses to the AMLCD panel. Experimental results show that the signal delays of the proposed structure are less than about 20% of the conventional structure.