Design and characteristics of high pulse repetition rate and high average power excimer laser systems

The authors describe the design and the performance characteristics of an X-ray preionized discharge pumped XeCl laser system operated at very high repetition rate frequency and high average power (200 W). The laser system is mainly composed of a fast flow subsonic closed cycle wind tunnel, a laser head, a high average power electrical excitation system, and an X-ray preionization source. The laser head design and the damping of acoustic waves induced by fast electrical energy deposition of 50 J/L bar allows this device to be operated at repetition rate frequencies of up to approximately=1700 Hz.<
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