High-speed high-efficiency large-area resonant cavity enhanced p-i-n photodiodes for multimode fiber communications

We report AlGaAs-GaAs p-i-n photodiodes with a 3-dB bandwidth in excess of 10 GHz for devices as large as 60-μm diameter. Resonant cavity enhanced photodetection is employed to improve quantum efficiency, resulting in more than 90% peak quantum efficiency at 850 nm.