Time Domain Analysis of 3-D Microwave Film Bulk Acoustic Resonator Based on Electro- Mechanical Coupling Algorithm

This letter presents an electro-mechanical coupling model for multiphysical field analysis of 3-D microwave film bulk acoustic resonator (FBAR). Microwave FBAR is composed of metal electrode, piezoelectric materials, and substrate. The electrical and mechanical characteristic are analyzed by three equations of piezoelectric constitutive equation, electrostatic field, and Newtonian equations of motion, respectively. Multiphysical coupling model equation is constructed by establishing the relationship between two equations through common physical quantities potential and displacement. In the end, the multiphysical coupling model equation is calculated using the finite-difference time-domain (FDTD) method. Compared with the commercial software (COMSOL), the accuracy of the proposed electro-mechanical method is verified while the computational efficiency and memory requirements are significantly reduced.