A unique, multi-level-team microfabrication learning environment at Boise State University

A unique, multi-level-team microfabrication learning environment involving students and faculty from both Engineering and Applied Technology has been established at Boise State University. This two-semester laboratory sequence, which begins with safety/tool training, progresses to process modules, and ends with an integrated four-mask PMOS process, is team-taught by faculty from both the Electrical Engineering and the Semiconductor Technology programs. Although these programs are in different Colleges, they have partnered to offer these team courses and to share the resources of the 4000 ft/sup 2/ Idaho Microfabrication Laboratory. Engineering students and semiconductor technology students learn together in integrated teams that more accurately model the typical working environment found at present in industry fabs. New postdoctoral and graduate student researchers, who need to become familiar with the lab processes for their future research, are also incorporated into these teams. A shared approach to lab funding is also used. When combined with the personal mentoring of the faculty and staff, this diverse range of skill-levels enhances the learning environment and fosters an appreciation for the required diversity of skills needed to make a modern fab run smoothly. A detailed description of this laboratory learning environment, its objectives, and its approach is presented in this paper.