Micromachined low pass filters and coplanar waveguides for D-band frequencies based on HMDSN-membranes

This paper describes the fabrication and characterization of coplanar waveguides and low pass filters on thin dielectric membranes for D-band frequencies powered by transitions to rectangular waveguides. The membranes deposited from hexamethyldisilazane (HMDSN) were fabricated by removing the underlying silicon with micromachining techniques. Coplanar waveguides of various lengths based on these thin dielectric membranes have been fabricated and characterized as low-loss circuits for D-band frequencies. Two low pass filters with corner frequencies of 120 GHz and 170 GHz have been investigated, fabricated and characterized.