Performance analysis of microelectrofluidic systems using hierarchical modeling and simulation

With the development of increasingly complex microelectrofluidic devices and systems, system-level performance analysis is becoming an important aspect of design. System-level performance analysis is challenging because coupled-energy dynamics link system-level performance with component-level operation, thus necessitating a hierarchical approach to modeling and simulation. This paper presents a hierarchical modeling and simulation method for microelectrofluidic systems, in particular, and composite microsystems, in general. High-level stochastic queueing modeling is combined with low-level nodal modeling to support simulation accuracy with low simulation times. Results are reported for a microchemical handling system. System-level performance analysis is carried out and applied to architectural design optimization.