A new approach to characterize substrate losses of on-chip inductors

A new approach to characterize substrate losses of on-chip inductors is presented, that attributes the losses to a frequency dependence of the series resistor R/sub S/ of the equivalent circuit. The technique to extract R/sub S/(f) from y-parameters is described in detail. To demonstrate the important role of deembedding for accurate parameter extraction, several deembedding procedures are depicted and compared. As an example, results of a 5-turn inductor are discussed.