RF magnetron sputtering of Bi-Sr-Ca-Cu-O thin films

Thin films of the high-T/sub c/ material Bi-Sr-Ca-Cu-O were prepared by the RF-magnetron technique from a single reacted and sintered target in pure argon atmosphere on sapphire substrates. The samples were annealed for three minutes in pure oxygen at 810 degrees C. Their composition was studied by Rutherford backscattering. The superconducting transition was very broad, with R=O at 65 K for the best film. MgO substrates and nonsintered targets were also used. The behavior of the resistance in a magnetic field (up to 20 T) was studied.<
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