Low-loss fluorinated poly(arylene ether sulfide) waveguides with high thermal stability

Some novel cross-linkable fluorinated poly(arylene ether sulfides) (FPAESI) were synthesized for use in optical waveguide applications. The materials have high thermal stability, high optical transparency in the infrared communication region, and much less birefringence than other thermally stable fluorinated polyimides. The refractive index of FPAESI after storage at 100/spl deg/C for 1000 h remains almost constant, demonstrating their thermal stability. Furthermore, the refractive index of the material can be easily controlled by changing the fluorine content of the materials. The propagation loss of channel waveguides, which were fabricated using reactive ion etching was less than 0.42 dB/cm and 0.4 dB/cm at the wavelength of 1.55 /spl mu/m for TE and TM polarizations, respectively.