Miniaturization and integration of photoacoustic detection with a microfabricated chemical reactor system

Photoacoustic spectroscopy is a useful technique for monitoring chemical composition in mesoscale analysis systems because the detection limit scales favorably with miniaturization. The key element of a photoacoustic spectrometry system is the detector. This work focuses on the miniaturization of photoacoustic detection. In particular, we are using 3.4 /spl mu/m light to detect propane in a carbon dioxide background-a system that is useful for monitoring combustion reactions. Two systems have been developed. In the first, a miniature photoacoustic cell has been machined into the mounting block of a microfabricated chemical reactor, demonstrating the integration of a photoacoustic detector with a microsystem. The cell used a hearing aid microphone and an infrared diode that was modulated at the first acoustic resonance of the cell. As the gas composition of the cell changed from carbon dioxide to propane the resonance peak was observed to shift and increase, as was expected from theory. This work also presents the first demonstration of a microfabricated photoacoustic detection cell. The cell used an optical microphone and laser excitation brought into the cell via an optical fiber. The light was modulated at a frequency far below the first acoustic resonance, and a signal of 0.05 Pa was observed in the presence of propane.