Vacuum actuated gas delivery

The new Vacuum Actuated Cylinder (VAC/sup TM/) gas source provides sub-atmospheric pressure delivery of the metal fluorides commonly used as dopants for ion implant. The VAC gas source is a mechanical system based on an embedded pressure control device located inside the cylinder. A pre-set sub-atmospheric pressure must be achieved in the delivery manifold before flow is permitted from the cylinder. Even with the primary cylinder valve open, if the threshold activation pressure is not achieved, flow does not occur. This paper describes the VAC gas source technology, its operation and features that include improved safety and storage capacity. A detailed discussion of the testing procedures, results and future plans is also included.