New stable 10 pF gas-dielectric capacitors

10 pF gas-dielectric capacitors made of fused silica doped with titanium oxide have been developed. The capacitance was defined by the critical dimensions of the electrodes in a monolithic structure. The characteristics of the capacitors were found to show a temperature coefficient of -1.8/spl times/10/sup -7//K, with a deviation from the nominal value of a few parts in 10/sup 6/ and a dissipation factor of less than 3/spl times/10/sup -7/. Their long-term stability is expected to be in the order of one part in 10/sup 8/.