Using single source precursors and spray chemical vapor deposition to grow thin-film CuInS/sub 2/ [solar cells]

Solar cell thin films of CuInS/sub 2/ were deposited on fused silica, stainless steel, Kapton/sup TM/ and polybenzobisoxazole using the single source organometallic precursor (PPh/sub 3/)/sub 2/CuIn(SEt)/sub 4/, in conjunction with spray chemical vapor deposition. Films were deposited at temperatures ranging from 325-360/spl deg/C. As deposited, the films had a thickness on the order of 200 /spl Aring/. The grain structure of the films was found to vary with carrier gas flow rate and substrate temperature.