Simplified mass-production process for 16% efficiency multi-crystalline Si solar cells

We have developed a simplified mass-production process for 16% efficiency multi-crystalline silicon solar cells. In this paper, newly developed fabrication process without increasing process steps and applying expensive equipment is described. The main improved points are as follows: (1) novel texturing method using Na2CO/sub 3/: reduced fabrication cost compared to conventional NaOH+IPA etching; (2) optimization of PECVD temperature for SiN ARC; and (3) improved silver paste for fire-through of PECVD-SiN AR film: reduction of penetration into diffused n-layer during firing and finer line electrodes with high aspect ratio. By combining such novel technologies, 16% efficiency for 15 cm/spl times/15 cm cells has been obtained for four different suppliers mc-Si wafers.