A virtual 3-D multipole accelerated extractor for VLSI parasitic interconnect capacitance

A virtual 3-D extractor of the single dielectric is presented in this paper. In the indirect boundary integral equations, the plane charge distribution on the surface of conductors is replaced with a mesh charge distribution, and we use the multipole-accelerated algorithm to further depress the computational complexity. Numerical results show that its computational complexity is about O(n), where n is the number of the discrete variables. Within the comparable accuracy, it runs several times faster than Fastcap, which is presently a very advanced multipole-accelerated parasitic capacitance extractor.