Scalable High Pulsed Power VCSEL Arrays With Transparent Top Electrodes

We demonstrate an innovative approach to fabricating scalable VCSEL arrays for high-pulsed-power applications. The VCSEL arrays consist of tightly-packed, small-diameter mesas that are planarized and passivated with SU-8 resin, and connected by a large-area top transparent electrode made of indium tin oxide. Peak pulsed output power exceeding 100 kW/cm
²
of active area was achieved in arrays with very smoothly etched and passivated sidewalls, without the need of oxide aperture formation.