Miniaturization of high-frequency carrier-type thin-film magnetic field sensor using laminated film

We examined a laminated high-frequency carrier-type thin-film magnetic field sensor that consists of CoNbZr soft magnetic films with Nb nonmagnetic conductive interlayer. The lamination can change domain structure of the sensor and obtain high sensitivity. An impedance change of 6 /spl Omega/ and a gain of 43 k/spl Omega//T was achieved when the length of the laminated sensor was 1 mm. The gain is four times larger than that of a monolayer sensor.