Application of bi-directional thin-film micro wire array to RF integrated spiral inductors

Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space=9 /spl mu/m/2 /spl mu/m, an RF integrated inductor exhibited L=7.5 nH(+11% of air core's), R=7.6 /spl Omega/ and Q=6.3 (almost same as the air core's).