Magnetic properties of NdFeB thin film obtained by diffusion annealing

The magnetic properties and microstructure of diffusion annealed [Ta/Nd/NdFeB/Nd/Ta] thin films have been investigated. The NdFeB films were deposited on Si substrates by the magnetron sputtering method. The high coercivity NdFeB films were obtained by diffusion of Nd/NdFeB layers into films at 620/spl deg/C for 10 minutes. The films with the thickness ratio of Nd/NdFeB /spl ges/1 show good hard magnetic properties with high coercivity of about 20 kOe.