On-chip wireless interconnection with integrated antennas

The feasibility of integrated antennas for a wireless clock distribution system is investigated. A wide range of linear, meander, zigzag dipole, and loop antennas on 10 and 20 /spl Omega/-cm silicon and SOS substrates has been experimentally evaluated. A 2-mm long, 30-/spl mu/m wide, 30-degree zigzag dipole antenna pair on a 20 /spl Omega/-cm silicon substrate has -56 dB of transmission gain near 18 GHz. A loop-zigzag pair shows similar gain. The loop antenna with a compact size and an isotropic radiation pattern is ideal for a transmitter antenna.