Development of a compact single ion irradiation system

A compact single ion irradiation system has been developed to examine energetic particle effects on materials and devices. The system has been constructed by use of commercially available and inexpensive standard components and can be easily recomposed according to beam requirements for various irradiation experiments. The beam adjustment was automatically performed by help of a computer program based on a modified SIMPLEX method. The beam performances of the system, i.e., pulse width, the number of ions included in one pulse and beam size were examined by use of a microchannel plate, a Si-SSD, a CCD image sensor and a CR-39 track detector, respectively. A beam of a single ion, 1 nsec in pulse width and several /spl mu/m in diameter has been successfully produced by this system.