In-line wafer inspection data warehouse for automated defect limited yield analysis

A data warehouse approach for the automation of process zone-by-zone defect limited yield analysis is presented in this paper. The system employs pre-calculation of adder defects extraction and clustered defects recognition, a newly developed wafer-wise defect record structure, and a graphical user interface purpose-designed for data selection navigation. Analysis time can be reduced to less than 1% of that of benchmarked conventional procedures.