Design of MEMS millimeter-wave phase shifters

The design of the MEMS millimeter-wave phase shifters for a millimeter-wave phased antenna array is given in this paper. The MEMS phase shifter has the advantages of small volume, light weight, wide frequency-band, low insertion loss, excellent reliability, easy integration with microwave circuits, and so on. A quasi-static numerical-analysis method together with microwave network theory are used to analyze and design the MEMS millimeter-wave phase shifter. A new structure of a MEMS phase shifter with better electrical characteristics is finally presented.