Optimized step controller for a salient-pole micromotor

This paper describes a controller which optimizes the step response of a silicon, micromachined, electrostatic salient-pole micromotor. The control algorithm is based on the determination of two parameters, the critical and final times of the step response, which are obtained from a second-order differential equation of the micromotor model. The parameter values have been determined utilizing both analytical and empirical methods, which yield similar results.