850-nm VCSEL arrays for optical interconnection and transmission applications

A VCSEL array at a wavelength of 850 nm for application to optical parallel interconnection was developed. A uniform array on a p-type substrate was fabricated and installed in a 60-Gps-class parallel-interconnection module. A high polarization control was obtained for devices with strained quantum wells grown on a [311]B substrate. An index-guided semiconductor buried structure was fabricated to control the lateral mode. An air-post VCSEL array was fabricated on a [100] p-type substrate so that it could be driven by a bipolar transistor IC.