DNA biosensor. I. Development of a transducer compatible with silicon processing for DNA hybridisation detection

A sequence specific DNA biosensor based on capacitance monitoring of the hybridisation event has been developed. To date, the only hybridisation sensitive device was one with a mechanically degraded silicon structure. However, this method has poor reproducibility and is not suited for mass production. Manufacture of a sensor that is compatible with integrated circuit processing is of primary importance. To date the only successful sensor was modified using a diamond scribe. However, this method has poor reproducibility and is not suited for mass production. The aim of this work is to suitably modify the silicon surface to mimic the mechanically degraded devices using standard IC processing techniques. To date, both physically and electrically similar devices have been fabricated using standard silicon processing techniques. Biological analysis is ongoing and expected to yield a hybridisation sensitive device soon. The mechanism of sensitivity of the scratched devices is being further explored to help in the generation of an IC compatible transducer.