A real time infrared scene simulator in CMOS/SOI MEMS

A 64/spl times/128 real-time infrared (RTIR) CMOS/SOI scene generation IC is presented. The RTIR IC offers real-time dynamic thermal scene generation. This system is a mixed mode design, with analog scene information written and stored into a thermal pixel array. The design presented utilizes micro-electromechanical systems (MEMS) in conjunction with the 0.8 /spl mu/m SPAWAR CMOS/SOI process to develop a RTIR IC scene generator.