Refractive collimating microlens arrays by surface tension self-assembly

A new process for fabrication of refractive collimating microlens arrays is demonstrated. The lens mount is formed in the bonded layer of a bonded silicon-on-insulator wafer, and rotated out of plane by the surface tension obtained by melting rectangular pads of thick photoresist. The lenses are formed by melting circular pads of the same resist. Correct alignment of the mount normal to the substrate is achieved by sequential self-assembly of a supporting frame.