Epitaxial Lift-Off Technology for Large Size III–V-on-Insulator Substrate

III-V materials can be a very good channel candidate for monolithic 3D (M3D) integration due to the potential of high-performance and lower process temperature as compared with Si, since a low process temperature is crucial to avoid degradation of bottom devices. For III-V M3D integration, material transfer techniques are important, and such processes should be enabled by low process costs on a large wafer scale. In this study, we propose an InGaAs channel transfer technique by wafer bonding, epitaxial lift-off and III-V layers grown on Si substrate. Effective mobility of fabricated MOS HEMTs using transferred InGaAs layer was 1.3 times higher than that of Si MOSFETs. The proposing channel transfer technique would be useful for M3D integration because it provides wafer scalability, cost-effectiveness, back-gate biasing, and etc.