Frequency Symmetry Comparison of Cobweb-Like Disk Resonator Gyroscope With Ring-Like Disk Resonator Gyroscope

Frequency symmetry of a cobweb-like disk resonator gyroscope (CDRG) has been compared with a conventional ring-like disk resonant gyroscope (RDRG) in this letter to corroborate that linear beam structures have a better process tolerance than curved beam structures for micro-fabrication processes. The CDRG comprises multiple concentric cobweb-like rings and each is formed by 16 identical straight beams joined end-to-end. It exhibits as-fabricated symmetric vibration behavior superior to RDRGs. To compare as-fabricated structural symmetry, CDRG and RDRG are placed side-by-side on the same wafer and simulated using COMSOL. A tested frequency split as low as 0.56 Hz is achieved for CDRG, and the average relative frequency split is 79.7 ppm, which is approximately seven times smaller than that of RDRG. Additionally, a temperature characteristics test demonstrates that the as-fabricated CDRG has excellent temperature stability, and the relative frequency split varied by 2.83 ppm in the temperature ranging from -20 °C to +80 °C. The proposed concept is verified by the simulation and experimental results.