A Novel Kilovolts GaN Vertical Superjunction MOSFET With Trench Gate: Approach for Device Design and Optimization

In this paper, a gallium nitride (GaN) vertical superjunction (SJ) MOSFET with trench gate is proposed and studied by the TCAD simulation. In order to achieve the typical electric field (E-field) modulation effect by the P
⁺
/N/N
⁺
structure in the conventional Si SJ-MOS, the P-GaN/unintentional doped (UID)GaN/N
⁺
-GaN stack is alternatively used by taking into account the unavailability of P
⁺
-GaN. In this manner, the P-GaN and N
⁺
-substrate serve as the field-stop (FS) layers in the proposed GaN SJ-MOS. In the forward bias, the enhancement-mode function of the device is enabled by the gated side-wall and aperture composite channel that leads to a 1.47-V threshold voltage of the device. In the reverse bias, the breakdown of the device is governed by two mechanisms: 1) the punchthrough (PT) in the top P-GaN/N-drift junction due to the possible under design of the P-GaN thickness; 2) the avalanche breakdown triggered by high E-field due to the possible under design of the bottom UID-GaN thickness. Hence, from the uniform E-field distribution point of view, a device optimization approach for GaN vertical SJ-MOS is proposed. The hole and electron densities of P-GaN and N-drift are optimized to achieve a uniform E-field distribution in the device both in the lateral and vertical directions, which is found to be 6 × 10
¹⁶
cm
^-3
. Moreover, the thickness ratio of P-GaN/UID-GaN is designed to obtain an identical intrinsic breakdown for the top P-GaN/Ndrift junction and bottom UID/N-drift region, which enables the maximum Baliga's figure-of-merit (BFOM) of the device. The concept of device design and optimization is of great interests for GaN vertical device for over kilovolts applications.