High-Q and low-loss matching network elements for RF and microwave circuits

Experimental and theoretical results for microstrip line characteristics are included for several polyimide thicknesses and microstrip conductor widths. A closed-form expression for the equivalent dielectric constant of a multilayer dielectric structure is also derived to use with commercial CAD tools to design MMICs. Test data is also included for compact inductors processed using multilayer and multilevel plating on GaAs.