Si Photonics Butt-Coupled Waveguide Germanium Avalanche Photodiodes with Lateral SAM Structures

Butt-coupled lateral SAM structure waveguide Ge-APDs based on Si photonics technology were fabricated and evaluated. The excellent responsivity exceeding 20 A/W independent of polarization at the wavelength of 1600nm was experimentally demonstrated for TWDM-PON applications.