Photonic Integrated Circuit Based Sensing Modules with Hybrid Integration in the Silicon Nitride TriPleX™ Platform

Silicon-Nitride (Si
₃
N
₄
) based photonic integrated circuits (PICs) enable a good biophotonic sensing platform. The platforms allows integration of multiple sensor elements and operates over a broad wavelength range. The use of PIC technology allows it to be very sensitive as well as allow for wide dynamic ranges. Combined with (hybrid) integration of sources and detectors make the platform suitable both for high end desktop applications, as well as single use, disposable. The PIC platform and (hybrid) integration are described in this article and examples of biophotonic sensing are shown.