Vertical adjustment in surface-micromachined free-space micro-optical bench

Summary form only given. We have demonstrated a novel optical beam-steering device for vertical adjustment of the optical beams in the surface-micromachined free-space Si micro-optical bench. Vertical adjustment as large as 140 /spl mu/m has been realized. When combined with an integrated microlens, a vertical scanning angle of 5.5/spl deg/ is also demonstrated.